Etching

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Alcaline Wet Etching of Silicon

Examples of anisotrope etching of Si by RIE
  • Wet Chemical Etching (isotropic and anisotropic)
  • Plasma-assisted Reactive Ion Etching (RIE)

    Available gases: CHF3 SF6 O2
    Etched Materials : Si SiO2 Si3N4 TiO2 WO3

  • Metal etching by Inductively Coupled Plasma (ICP)
  • Ion milling by large argon beam
  • Polymer etching by oxygen plasma
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